200mm Open Cassette Adapter

Handling 200mm Open Cassette at 300mm wafer Loadport

  • Easy Retrofit in FAB (Estimated adaptation time (1 Loadport): 3 Hours

  • Installation of adapter with safety cover to carrier base

  • Exchange of mapping sensor arm (Applicable to 200mm/300mm mapping sensor arm)
  • Modification of wafer protrusion sensor position
  • Preventing mechanism for wafer protrusion

  • Vertical wafer placement by operator

  • Stabilizing stage rotation with damper function
  • Preventing mechanism for incorrect pick-up

  • FOUP Clump structure (SEMI standard) clumps open cassette during "Adaptor Stage Close" motion
  • Wafer mapping function

  • Operable in SELOP-7

  • Aplicable for 200mm standard wafer and thin wafer



Semiconductor Handling

It is our mission to provide all handling components and proper integration needed for Semiconductor Tool Automation.

The range of products that we provide cover all components used for the entire Front End Handling (EFEM), such as atmospheric robots, prealigner, load ports, wafer ID reader, etc. as well as all handling equipment needed for process tool automation such as atmospheric or vacuum robots. These products are available either as individual handling component or in any combination needed.

A single interface providing communication with all components allows our customers to concentrate on their core business with the knowledge that all handling requirements are well controlled and all components are perfectly coordinated.